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22FD-SOI Variability Improvement Thanks to SmartCut Thickness Control at Atomic Scale
Conference proceeding

22FD-SOI Variability Improvement Thanks to SmartCut Thickness Control at Atomic Scale

W. Schwarzenbach, L. Loubriat, V. Joseph, L. Viravaux, O. Moreau, S. Lasserre, B.-Y. Nguyen and IEEE
Proceedings of the European Solid State Device Research Conference, Vol.2019-, pp.64-65
09/2019
DOI: https://doi.org/10.1109/ESSDERC.2019.8901827

Abstract

Atomic layer deposition Chemicals Europe FD-SOI Performance evaluation Process control Production SmartCut Surface treatment Thickness control Thickness Variability
Beyond 65FD-SOI, 28FD-SOI, 22FD-SOI production granted technologies, continuous SmartCut TM development support advanced SOI requirements. To improve SOI layer thickness variability, a 2 nd generation chemical thinning process step is proposed. 11% and 25% improvements are demonstrated on 100% and on 75% of the wafer surface, respectively. This improved product is ready for pre-production.

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