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A novel RFCMOS process monitoring test structure
Conference proceeding

A novel RFCMOS process monitoring test structure

C. B Sia, B. H Ong, K. M Lim, K. S Yeo, M. A DO, J. G MA, T Alam and ieee
ICMTS 2004 : proceedings of the 2004 International Conference on Microelectronic Test Structures : March 22-25, 2004, Awaji Yumebutai International Conference Center, Japan, pp.45-50
2004 international conference on microelectronic test structures (March 22-25, 2004, Awaji Yumebutai International conference Center, Japan)
2004

Abstract

Applied sciences Dielectric, amorphous and glass solid devices Diodes Electronics Exact sciences and technology Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Testing, measurement, noise and reliability Transistors

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