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A novel silicon-based CBCPW-fed CBCPS ring resonator
Conference proceeding

A novel silicon-based CBCPW-fed CBCPS ring resonator

Kaixue Ma, Jianguo Ma, Manh Anh Do, Kiat Seng Yeo, Jianbo Sun and Jianmin Miao
2004 7th International Conference on Solid-State and Integrated Circuits [i.e. Circuit] Technology : proceedings, 0ctober 18-21, 2004, Beijing, China, Vol.1, pp.179-182 vol.1
2004
DOI: https://doi.org/10.1109/ICSICT.2004.1434981

Abstract

Conductors Coplanar waveguides Dielectric losses Dielectric substrates Fabrication Integrated circuit technology Optical ring resonators Planar transmission lines Q factor Silicon
A silicon-based uni-planar CBCPW-fed CBCPS ring resonator is introduced for the first time. The simulated Q-factor of CBCPS ring is higher than that of the microstrip line (MSL) ring and a weak parasite resonant phenomenon is existed in spectrum response of the CBCPS ring resonator due to the crosstalk of the PP (parallel plate) modes. The micromachined fabrication process is employed to fabricate the designed planar resonator. The measured unloading Q-factors of the CBCPS ring resonator are 53.5 at 10.62GHz, 45 at the second resonant frequency 20.93GHz.

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