Aluminum Nitride Photonics Platforms on Silicon Substrate

Nanxi Li; Chong Pei Ho; Yanmei Cao; Shiyang Zhu; George F. R. Chen; Yuan Hsing Fu; Yao Zhu; Dawn T. H. Tan; Lennon Y. T. Lee; IEEE; Tse Hui Dawn Tan

Conference proceeding

Aluminum Nitride Photonics Platforms on Silicon Substrate

Nanxi Li, Chong Pei Ho, Yanmei Cao, Shiyang Zhu, George F. R. Chen, Yuan Hsing Fu, Yao Zhu, Dawn T. H. Tan, Lennon Y. T. Lee, IEEE, …

2021 Conference on Lasers and Electro-Optics (CLEO), pp.1-2

05/2021

Abstract

(130.3130) Integrated optics materials

(230.3120) Integrated optics devices

III-V semiconductor materials

Integrated optics

Optical materials

Photonic crystals

Scandium

Silicon

Substrates

The CMOS-compatible AlN photonics platforms developed within Institute of Microelectronics (IME) are presented, and nonlinear index of the AlN is reported. The photonics devices demonstrated are reviewed, and the future prospective is provided.

Metrics

1 Record Views

Details

Title: Aluminum Nitride Photonics Platforms on Silicon Substrate
Creators - without role: Nanxi Li - ASTAR (Agency for Science, Technology and Research),Institute of Microelectronics,Singapore,138634
Chong Pei Ho - ASTAR (Agency for Science, Technology and Research),Institute of Microelectronics,Singapore,138634
Yanmei Cao - Singapore University of Technology and Design
Shiyang Zhu - ASTAR (Agency for Science, Technology and Research),Institute of Microelectronics,Singapore,138634
George F. R. Chen - Singapore University of Technology and Design
Yuan Hsing Fu - ASTAR (Agency for Science, Technology and Research),Institute of Microelectronics,Singapore,138634
Yao Zhu - ASTAR (Agency for Science, Technology and Research),Institute of Microelectronics,Singapore,138634
Dawn T. H. Tan - Singapore University of Technology and Design
Lennon Y. T. Lee - ASTAR (Agency for Science, Technology and Research),Institute of Microelectronics,Singapore,138634
IEEE
Tse Hui Dawn Tan - EPD Pillar
Publication Details: 2021 Conference on Lasers and Electro-Optics (CLEO), pp.1-2
Publisher: OSA
Number of pages: 2
Grant note: Science and Engineering Research Council (10.13039/501100005049)
Identifiers: 9911489409846
Academic Unit: EPD Pillar
Language: English
Resource Type: Conference proceeding

Aluminum Nitride Photonics Platforms on Silicon Substrate

Abstract

Metrics

Details

Singapore University of Technology and Design Social media