Abstract
This paper gives an in-depth analysis of the parameters affecting the alpha parameter which is used for extracting the surface recombination velocity in EBIC line scan measurements. The analysis shows that the alpha versus normalized surface recombination velocity curve is a function of both the normalized beam depth as well as the normalized scanning range. However, it was found that the impact of the variations in these two parameters on the accuracy in extracting the surface recombination velocity is not significant. The analysis was further verified with the use of computer simulation.