Controllable periodic structures on silicon wafer by CO2 laser irradiation

Conference proceeding

Peer reviewed

W. J Wang, Y. F LU, C. W AN, M. H Hong and T. C Chong

Applied surface science, Vol.186(1-4), pp.594-598

Proceedings of the European Materials Research Society 2001 - symposium L Photon-induced surface processing, Strasbourg, France, June 5-8, 2001

28/01/2002

Abstract

Condensed matter: electronic structure, electrical, magnetic, and optical properties

Cross-disciplinary physics: materials science; rheology

Electron and ion emission by liquids and solids; impact phenomena

Exact sciences and technology

Impact phenomena (including electron spectra and sputtering)

Laser-beam impact phenomena

Materials science

Physics

Surface cleaning, etching, patterning

Surface treatments

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Title: Controllable periodic structures on silicon wafer by CO2 laser irradiation
Creators - without role: W. J Wang - National University of Singapore
Y. F LU - Data Storage Institute
C. W AN - National University of Singapore
M. H Hong - National University of Singapore
T. C Chong - Duke-NUS Medical School
Publication Details: Applied surface science, Vol.186(1-4), pp.594-598
Conference: Proceedings of the European Materials Research Society 2001 - symposium L Photon-induced surface processing, Strasbourg, France, June 5-8, 2001
Publisher: Elsevier Science
Number of pages: 5
Grant note: European Materials Research Society
Identifiers: 9911392009846
Academic Unit: Temasek Lab
Language: English
Resource Type: Conference proceeding