- Title
- Effects of Si(001) surface amorphization on ErSi2 thin film
- Creators - without role
- E. J Tan - Nanyang Technological UniversityM. L Kon - National University of SingaporeK. L Pey - Nanyang Technological UniversityP. S Lee - Nanyang Technological UniversityY. W Zhang - Duke-NUS Medical SchoolW. D Wang - Institute of Materials Research and EngineeringD. Z Chi - Institute of Materials Research and Engineering
- Publication Details
- Thin solid films, Vol.504(1-2), pp.157-160
- Conference
- Proceedings of the International Conference on Materials for Advanced Technologies (ICMAT 2005) Symposium H: Silicon microelectronics: processing to packaging, Singapore, July 3-8, 2005
- Publisher
- Elsevier Science
- Number of pages
- 4
- Identifiers
- 9914315509846
- Academic Unit
- Engineering Product Development (EPD); Temasek Lab
- Language
- English
- Resource Type
- Conference proceeding
Conference proceeding
Effects of Si(001) surface amorphization on ErSi2 thin film
Thin solid films, Vol.504(1-2), pp.157-160
Proceedings of the International Conference on Materials for Advanced Technologies (ICMAT 2005) Symposium H: Silicon microelectronics: processing to packaging, Singapore, July 3-8, 2005
10/05/2006
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