Femtosecond Laser Irradiation for Functional Micro-/Nanostructure Fabrication

Minghui Hong; Zaichun Chen; Min Tang; Luping Shi; Tow Chong Chong; IEEE

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Conference proceeding

Femtosecond Laser Irradiation for Functional Micro-/Nanostructure Fabrication

Minghui Hong, Zaichun Chen, Min Tang, Luping Shi, Tow Chong Chong and IEEE

2009 Conf. on Lasers and Electro Optics and the Pacific Rim Conf. on Lasers and Electro - Optics, p.168

01/01/2009

Abstract

Engineering

Engineering, Electrical & Electronic

Optics

Physical Sciences

Science & Technology

Technology

Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning

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Title: Femtosecond Laser Irradiation for Functional Micro-/Nanostructure Fabrication
Creators - without role: Minghui Hong - Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
Zaichun Chen - Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
Min Tang - Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
Luping Shi - Data Storage Institute
Tow Chong Chong - Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
IEEE
Publication Details: 2009 Conf. on Lasers and Electro Optics and the Pacific Rim Conf. on Lasers and Electro - Optics, p.168
Publisher: IEEE
Number of pages: 2
Identifiers: 9911394709846
Academic Unit: Temasek Lab
Language: English
Resource Type: Conference proceeding

Femtosecond Laser Irradiation for Functional Micro-/Nanostructure Fabrication

Abstract

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