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Finline technology for millimeter-wave MEMS
Conference proceeding

Finline technology for millimeter-wave MEMS

Jeffrey S Fu, Jiaoyun Zhou, Yilong Lu, Jianguo Ma, Zhongxiang Shen and Jianying Zhou
Proceedings of SPIE, Vol.5116(1), pp.523-530
Smart Sensors, Actuators, and MEMS
01/01/2003

Abstract

Recent development of finline 35 GHz MEM modules like Gunn oscillator, PIN switch, and filters at Nanyang Technological University will be discussed. The design tools and measurement equipments like Advanced Design System (ADS), High Frequency Structure Simulator (HFSS) and Vector Network Analyzer (VNA) are used extensively throughout the work.

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