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Irradiation of on-chip chalcogenide glass waveguide mid-infrared gas sensor
Conference proceeding

Irradiation of on-chip chalcogenide glass waveguide mid-infrared gas sensor

Peter Su, Zhaohong Han, Derek Kita, Vivek Singh, Qingyang Du, Lionel Kimerling, Juejun Hu, Anu Agarwal, Pao Tai Lin, Kathleen Richardson, …
IEEE SENSORS 2016 : Orlando, Florida, USA, October 30-November 2, 2016 : 2016 proceedings papers, pp.1-3
10/2016
DOI: https://doi.org/10.1109/ICSENS.2016.7808675

Abstract

chalcogenide glass gas detection gas sensor Glass integrated photonics Methane Optical fiber sensors Optical resonators Optical waveguides radiation Radiation effects
We measure the effect of radiation damage on an on-chip mid-infrared methane gas sensor made using a spiral chalcogenide glass waveguide. The sensor is fabricated using UV lithography and a lift-off process after deposition of chalcogenide glass using a thermal evaporator. We measure the transmittance change of the sensor at varying concentrations of methane after varying doses of irradiation.

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