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Large-area plasmonic structures fabricated by laser nanopatterning and their applications
Conference proceeding

Large-area plasmonic structures fabricated by laser nanopatterning and their applications

M. H. Hong, C. H. Liu, F. Ma, Z. C. Chen, B. Luk'yanchuk, L. P. Shi and T. C. Chong
LASER-BASED MICRO- AND NANOPACKAGING AND ASSEMBLY III, Vol.7202(1), pp.72020K-72020K-10
Proceedings of SPIE
01/01/2009

Abstract

Nanoscience & Nanotechnology Optics Physical Sciences Physics Physics, Applied Science & Technology Science & Technology - Other Topics
Laser interference lithography is applied to fabricate large-area plasmonic nanostructures. This approach has the advantages of being non-contact process in air and able to achieve large-area and maskless nanolithography at a high speed with low system investment. Single layer Au or Ag noble metallic thin film and Ag/Au,Ag/Ni or Au/Ni bimetallic layer thin films are patterned into nano-dot, nano-rod and nano-nut arrays by laser interference lithography. Plasmonic effects of the fabricated metallic nanostructures are studied. Tunable and multi-peak surface plasmon resonances of these nanostructures can be obtained, which have potential applications in solar cells, bio-sensing and photonic circuits.

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