- Title
- Laser-controlled etching of (Al,Ga)As epitaxial layers
- Creators - without role
- T C ChongY F LuA Lee
- Contributors - without role
- R SinghD NortonL LaudeJ NarayanJ Cheung
- Publication Details
- MRS proceedings, Vol.397, pp.491-496
- Series
- Materials Research Society Symposium Proceedings
- Publisher
- Materials Research Soc
- Number of pages
- 6
- Identifiers
- 9911408409846
- Academic Unit
- Temasek Lab
- Language
- English
- Resource Type
- Conference proceeding
Conference proceeding
Laser-controlled etching of (Al,Ga)As epitaxial layers
MRS proceedings, Vol.397, pp.491-496
Materials Research Society Symposium Proceedings
01/01/1996
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