Laser dry cleaning of ZrO2 particles from air bearing surface of magnetic head sliders

Conference proceeding

Y F Lu, W D Song, M H Hong, T C Chong and T S Low

MRS proceedings, Vol.397, pp.329-334

Materials Research Society Symposium Proceedings

01/01/1996

Abstract

Materials Science

Materials Science, Multidisciplinary

Optics

Physical Sciences

Science & Technology

Technology

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Title: Laser dry cleaning of ZrO2 particles from air bearing surface of magnetic head sliders
Creators - without role: Y F Lu
W D Song
M H Hong
T C Chong
T S Low
Contributors - without role: R Singh
D Norton
L Laude
J Narayan
J Cheung
Publication Details: MRS proceedings, Vol.397, pp.329-334
Series: Materials Research Society Symposium Proceedings
Publisher: Materials Research Soc
Number of pages: 6
Identifiers: 9911300409846
Academic Unit: Temasek Lab
Language: English
Resource Type: Conference proceeding