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SMART SKIN OF SELF-POWERED HAIR CELL FLOW SENSORS FOR SENSING HYDRODYNAMIC FLOW PHENOMENA
Conference proceeding

SMART SKIN OF SELF-POWERED HAIR CELL FLOW SENSORS FOR SENSING HYDRODYNAMIC FLOW PHENOMENA

A. G. P. Kottapalli, M. Asadnia, E. Kanhere, M. S. Triantafyllou, J. M. Miao and IEEE
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), pp.387-390
01/01/2015

Abstract

Engineering Engineering, Electrical & Electronic Instruments & Instrumentation Science & Technology Technology
In nature, there exist numerous and diverse, highly sensitive and well-evolved biological hair cell sensors which work on the principles of mechanotransduction, serving various sensing needs. This work presents a flexible biomimetic smart skin of self-powered piezoelectric hair cell flow sensors capable of sensing underwater flow phenomena. We developed a 2D array of 20 MEMS flow sensors arranged in a 4x5 pattern spanning a foot-print of 30mmx40mm. Experimental results demonstrate the ability of individual sensors to detect flow velocities as low as 8.24 mu m/s. The array is capable of determining the location, and distance of an underwater stimulus with an error below 1%.

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