Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces

W.D. Song; Y.F. Lu; M.H. Hong; T.C. Chong; T.S. Low; IEEE

doi:10.1109/LEOSST.1996.540682

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Conference proceeding

Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces

W.D. Song, Y.F. Lu, M.H. Hong, T.C. Chong, T.S. Low and IEEE

Digest, pp.69-70

1996

DOI: https://doi.org/10.1109/LEOSST.1996.540682

Abstract

Cleaning

Laser beams

Laser theory

Laser transitions

Optical microscopy

Optical pulses

Potential energy

Scanning electron microscopy

Surface emitting lasers

Thermal expansion

In order to develop laser cleaning technology to meet the need of industry, it is very important to investigate the cleaning efficiency and mechanism of this cleaning technology. Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces is discussed in the paper.

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Title: Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces
Creators - without role: W.D. Song - Duke-NUS Medical School
Y.F. Lu - Duke-NUS Medical School
M.H. Hong - Duke-NUS Medical School
T.C. Chong - National University of Singapore
T.S. Low - Duke-NUS Medical School
IEEE
Publication Details: Digest, pp.69-70
Publisher: IEEE
Number of pages: 2
Identifiers: 9911401209846
Academic Unit: Temasek Lab
Language: English
Resource Type: Conference proceeding

Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces

Abstract

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