Abstract
A super-resolution near-field phase-change optical disk with a new mask layer of Sb 2 Te 3 was studied. The disks were fabricated and characterized. The problem of thermal stability for the conventional Super-RENS (Super-Resolution Near-field Structure) was studied for the first time. In order to solve the problem of poor thermal stability, two new structures with a thermal shield layer that can significantly improve thermal stability were proposed, fabricated, and analyzed. Recording marks as small as 56 nm were observed.