A novel method for film thickness measurement of perfluoropolyether lubricant by secondary ion mass spectroscopy

Journal article

Peer reviewed

LEI Zhu, Tom Liew and T. C Chong

Applied surface science, Vol.189(1-2), pp.53-58

14/04/2002

Abstract

Exact sciences and technology

General

Measurements common to several branches of physics and astronomy

Metrology, measurements and laboratory procedures

Physics

Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements)

Spatial dimensions (eg, position, lengths, volume, angles, displacements, including nanometer-scale displacements)

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Title: A novel method for film thickness measurement of perfluoropolyether lubricant by secondary ion mass spectroscopy
Creators - without role: LEI Zhu - Data Storage Institute
Tom Liew - Data Storage Institute
T. C Chong - Data Storage Institute
Publication Details: Applied surface science, Vol.189(1-2), pp.53-58
Publisher: Elsevier Science
Number of pages: 6
Identifiers: 9911290709846
Academic Unit: Temasek Lab
Language: English
Resource Type: Journal article