An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives

Journal article

Peer reviewed

J. P Yang, X. C Deng and T. C Chong

Journal of micromechanics and microengineering, Vol.15(5), pp.958-965

01/05/2005

Abstract

Applied sciences

Electronics

Exact sciences and technology

General

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Mechanical engineering. Machine design

Mechanical instruments, equipment and techniques

Microelectronic fabrication (materials and surfaces technology)

Micromechanical devices and systems

Physics

Precision engineering, watch making

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives
Creators - without role: J. P Yang - Data Storage Institute
X. C Deng - Agency for Science, Technology and Research
T. C Chong - Agency for Science, Technology and Research
Publication Details: Journal of micromechanics and microengineering, Vol.15(5), pp.958-965
Publisher: Institute of Physics
Number of pages: 8
Identifiers: 9911282609846
Academic Unit: Temasek Lab
Language: English
Resource Type: Journal article