Abstract
The effective channel length L sub(eff) and total external series resistance R sub(TOText) of deep submicron lightly doped drain (LDD) pMOSFETs, operating in a Bi-MOS hybrid-mode environment, have been modeled as functions of bias and temperature. The accuracy of the device threshold voltage used in the L sub(eff) and R sub(TOText) extraction routine is discussed. The proposed models have been verified for temperature ranging from 223 K to 398 K and source-to-body voltage V sub(SB)>0 V conditions