Abstract
Moisture sorption, glass transition temperature (
T
g) and morphology of ultra thin poly(chloro-
p-xylylene) (parylene-C) are greatly influenced by geometrical confinement effects. For film <50
nm, the equilibrium moisture saturation is a decreasing function of film thickness. However, the
T
g of film <50
nm is about 10
°C higher than thicker films. The above phenomena are attributed to the effect of geometrical confinement on the thermal properties and the morphology of parylene-C film. Surface confinement results in an increased in
T
g, but a decreased in crystallinity for films <50
nm. In this study, we show that the increase in moisture sorption for parylene-C films <50
nm is dominated by the crystallinity variation.