Abstract
Epitaxial anatase Co:TiO
2 thin films were grown on LaAlO
3 (0
0
1) substrates by co-sputtering method. Structural and compositional properties were measured as a function of deposition parameters to explore the growth mechanism of the anatase films. Epitaxial anatase structure can be obtained at deposition temperatures ranged from 500°C to 750°C. magnetization measurements show that the saturation magnetization (
M
s) increases as deposition temperature increases. At 750°C,
M
s is about 1.13
μ
B/Co. X-ray diffraction results show that the sample has a superior anatase crystallinity with the full-width at half-maximum of 0.13°. It was found that
M
s is directly related with the crystallinity, i.e.,
M
s increases as the crystallinity of samples improves.