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Fabrication of multi-dimensional colloid crystals on raised surfaces via reversal nanoimprint lithography
Journal article   Peer reviewed

Fabrication of multi-dimensional colloid crystals on raised surfaces via reversal nanoimprint lithography

Wei Zhao, Yuebing Zheng and Hong Yee Low
Microelectronic engineering, Vol.83(3), pp.404-408
01/03/2006

Abstract

Colloidal particles Nanoimprint lithography Patterning
Fabrication of multi-dimensional colloidal crystals on raised polymer substrate has been achieved by reversal nanoimprint technique. The combine effects of the feature size of the mold, particle diameter and imprinting steps control ordering of the colloidal particles. It is shown that using ‘Reversal nanoimprint lithography’, 3D colloidal particles can be selectively patterned on soft (polymer) substrates. Reversal nanoimprint lithography offers a relatively easy, fast and versatile method for patterning of colloidal particles.

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