Investigation of Range-energy Relationships for Low-energy Electron Beams in Silicon and Gallium Nitride

Journal article

Peer reviewed

O. Kurniawan and V. K. S. Ong

Scanning, Vol.29(6), pp.280-286

11/2007

PMID: 17957746

Abstract

electron beam

electron range

generation volume

Monte Carlo

1 Record Views

Title: Investigation of Range-energy Relationships for Low-energy Electron Beams in Silicon and Gallium Nitride
Creators - without role: O. Kurniawan - Nanyang Technological University
V. K. S. Ong - Nanyang Technological University
Publication Details: Scanning, Vol.29(6), pp.280-286
Publisher: Wiley Subscription Services, Inc., A Wiley Company
Number of pages: 7
Identifiers: 9912334309846
Academic Unit: ISTD Pillar
Language: English
Resource Type: Journal article