Abstract
Super-resolution near-field phase-change Blu-ray-type optical disks with a mask layer of Sb 2 Te 3 were studied theoretically and experimentally with a laser wavelength of 405 nm and a numerical aperture (NA) of 0.85. The modulation transfer function (MTF) was calculated and the thermal performance was simulated by the finite element method. Super-resolution near-field phase-change Blu-ray-type optical disks with different structures were fabricated and measured. It was shown that the thermal shield layer was helpful in reducing recorded mark size and improving readout stability. Recorded marks as small as 16 nm were observed. The relevant mechanism was discussed.