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Laser-induced Ni ( Ti ) silicide formation
Journal article   Peer reviewed

Laser-induced Ni ( Ti ) silicide formation

Y. Setiawan, P. Lee, K. Pey, X. Wang and G. Lim
Applied physics letters, Vol.88(11), pp.113108-113108-3
13/03/2006

Abstract

Effects of Ti alloying during laser-induced Ni silicide formation is studied. Unique triple layer microstructures were found with the presence of supercell in the NiSi 2 grains formed at the interface. This supercell formation was caused by a local ordering of Ni and Si atoms that favor lower free energy during rapid solidification. Ti rapidly segregates from the alloy melt and forms a protective TiO x overlayer on the surface during solidification. Melt front progressing towards the Ni-rich region leads to quenching of an amorphous layer sandwiched between NiSi 2 grains and the TiO x overlayer.
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https://doi.org/10.1063/1.2186073View
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