Latchup characterization of 0.18-micron STI cobalt silicided test structures

Journal article

Wang-Ling Goh, Kiat-Seng Yeo, Stephen Lazuardi, Wei Peng, Kam-Chew Leong, Lap Chan and Alex See

Microelectronics, Vol.32(9), pp.725-731

01/09/2001

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Title: Latchup characterization of 0.18-micron STI cobalt silicided test structures
Creators - without role: Wang-Ling Goh - Nanyang Technological University
Kiat-Seng Yeo - Nanyang Technological University
Stephen Lazuardi
Wei Peng
Kam-Chew Leong
Lap Chan
Alex See
Publication Details: Microelectronics, Vol.32(9), pp.725-731
Number of pages: 7
Identifiers: 9912506509846
Academic Unit: Office of Provost
Language: English
Resource Type: Journal article