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Novel soft stamp development for direct micro- and nano-patterning of macroscopic curved surfaces
Journal article   Peer reviewed

Novel soft stamp development for direct micro- and nano-patterning of macroscopic curved surfaces

Su Hui Lim, Hong Yee Low and Wui Siew Tan
Journal of vacuum science and technology. B, Nanotechnology & microelectronics, Vol.34(1), 011602
01/01/2016

Abstract

Engineering Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physical Sciences Physics Physics, Applied Science & Technology Science & Technology - Other Topics Technology
Surface topographical patterning is a simple way to functionalize surfaces without changing material chemistry. Topographical patterning of nonplanar surfaces has remained a challenge, despite sought after applications in microfluidics, optics, and biomedical technologies. Here the authors develop transparent, reusable soft molds that allow facile micro- and nanopatterning of macroscopically curved surfaces. The authors use bilayer molds with a soft backing and a hard pattern carrying layer to overcome challenges that arise from the opposing need for mold compliance (to allow conformal contact with nonflat substrates) and rigidity (to maintain patterned feature resolution and fidelity). With our approach, high yield curved surface patterning (> 98%) over large (2 x 1 cm) area can be effectively achieved. Structure replication down to 80 nm resolution is demonstrated. (C) 2016 American Vacuum Society.
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https://doi.org/10.1116/1.4938075View
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