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Resistive switching in NiSi gate metal-oxide-semiconductor transistors
Journal article   Peer reviewed

Resistive switching in NiSi gate metal-oxide-semiconductor transistors

X. Li, W. H. Liu, N. Raghavan, M. Bosman and K. L. Pey
Applied physics letters, Vol.97(20), pp.202904-202904-3
15/11/2010

Abstract

Physical Sciences Physics Physics, Applied Science & Technology
Both unipolar and bipolar resistive switchings are demonstrated on NiSi gate transistors after gate dielectric percolation. Nanoscale Ni filaments and oxygen ion conduction are found in the percolation path as the physical defects responsible for resistive switching. Memory cells can be fabricated together with the metal gate transistors for ease of integration. (C) 2010 American Institute of Physics. [doi:10.1063/1.3516466]

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