Structural characterization of rapid thermally oxidized silicon–germanium–carbon alloy films

Journal article

Peer reviewed

W.K Choi, L.K Bera, J.H Chen, W Feng, K.L Pey, Hans Yoong, J Mi, Fan Zhang and C.Y Yang

Materials science & engineering. B, Solid-state materials for advanced technology, Vol.75(2-3), pp.184-186

01/06/2000

Metrics

1 Record Views

Title: Structural characterization of rapid thermally oxidized silicon–germanium–carbon alloy films
Creators - without role: W.K Choi - Duke-NUS Medical School
L.K Bera - National University of Singapore
J.H Chen - National University of Singapore
W Feng - National University of Singapore
K.L Pey - Duke-NUS Medical School
Hans Yoong - Santa Clara University
J Mi - Santa Clara University
Fan Zhang - Santa Clara University
C.Y Yang - Santa Clara University
Publication Details: Materials science & engineering. B, Solid-state materials for advanced technology, Vol.75(2-3), pp.184-186
Number of pages: 3
Identifiers: 9914222809846
Academic Unit: Engineering Product Development (EPD); Temasek Lab
Language: English
Resource Type: Journal article