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- Title
- Sub-10 nm Nanoimprint Lithography by Wafer Bowing
- Creators - without role
- Wei Wu - Hewlett-Packard (United States)William M. Tong - Hewlett-Packard (United States)Jonathan Bartman - Hewlett-Packard (United States)Yufeng Chen - Hewlett-Packard (United States)Robert Walmsley - Hewlett-Packard (United States)Zhaoning Yu - Hewlett-Packard (United States)Qiangfei Xia - Hewlett-Packard (United States)Inkyu Park - Hewlett-Packard (United States)Carl Picciotto - Hewlett-Packard (United States)Jun Gao - Hewlett-Packard (United States)Shih-Yuan Wang - Hewlett-Packard (United States)Deborah Morecroft - Hewlett-Packard (United States)Joel Yang - HP Laboratories, Hewlett-Packard Co., Palo Alto, California 94304, Hewlett-Packard Co., Corvallis, Oregon 97330, and Massuchusetts Institute of Technology, Cambridge, Massachusetts 02139Karl K. Berggren - Hewlett-Packard (United States)R. Stanley Williams - Hewlett-Packard (United States)Kwang Wei Joel Yang - EPD Pillar
- Publication Details
- Nano letters, Vol.8(11), pp.3865-3869
- Number of pages
- 5
- Identifiers
- 9911744109846
- Academic Unit
- Engineering Product Development (EPD)
- Language
- English
- Resource Type
- Journal article