Abstract
A microlens array has become an important micro-optics device in various applications. Compared with traditional manufacturing approaches, digital light processing (DLP)-based printing enables fabrication of complex three-dimensional (3D) geometries and is a possible manufacturing approach for microlens arrays. However, the nature of 3D printing objects by stacking successive 2D patterns formed by discrete pixels leads to coarse surface roughness and makes DLP-based printing unsuccessful in fabricating optical components. Here, we report an oscillation-assisted DLP-based printing approach for fabrication of microlens arrays. An optically smooth surface (about 1 nm surface roughness) is achieved by mechanical oscillation that eliminates the jagged surface formed by discrete pixels, and a 1–3 s single grayscale ultraviolet (UV) exposure that removes the staircase effect. Moreover, computationally designed grayscale UV patterns allow us to fabricate microlenses with various profiles. The proposed approach paves a way to 3D print optical components with high quality, fast speed, and vast flexibility.