Unveiling the electromigration physics of ULSI interconnects through statistics

Journal article

Peer reviewed

Semiconductor science and technology, Vol.22(8), pp.941-946

01/08/2007

Abstract

Applied sciences

Design. Technologies. Operation analysis. Testing

Electronics

Exact sciences and technology

Integrated circuits

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Unveiling the electromigration physics of ULSI interconnects through statistics
Creators - without role: CHER MING Tan - Nanyang Technological University
Nagarajan Raghavan - Nanyang Technological University
Publication Details: Semiconductor science and technology, Vol.22(8), pp.941-946
Publisher: Institute of Physics
Number of pages: 6
Identifiers: 9912356509846
Academic Unit: Engineering Product Development (EPD)
Language: English
Resource Type: Journal article